Handbook of deposition technologies for films and coatings : science, applications and technology
Peter M Martin
This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.
Категорії:
Рік:
2010
Видання:
3rd ed
Видавництво:
Elsevier
Мова:
english
ISBN 10:
081552031X
ISBN 13:
9780815520313
Файл:
PDF, 31.87 MB
IPFS:
,
english, 2010